The ETALON Series probe have two polysilicon levers with
a pedestal and monocrystal silicon tips.
Precision technology of polysilicon deposition guarantees the lever thickness control.
A special frequency stabilizer is designed to make the dispersion of the resonant frequency and force constant smaller (due to the lever length control).
Thanks to the above mentioned facts, the ETALON probes are characterized by highly reproducible parameters:
• Typical dispersion of the lever thickness: ±0.15 μm
• Typical dispersion of the lever length: ±2 μm
• Typical dispersion of the probe resonant frequency: ±10%
• Typical dispersion of the force constant: ±20%. |